The total investment is 500 million yuan! Zibo Another Fluorine Chemical Project Started
Recently, the on-site promotion meeting of major projects of high-quality development in Shandong Province and the centralized commencement of major projects of high-quality development in the whole county were held. A total of 19 projects were launched in Gaoqing County in the first quarter, covering eight industrial fields, including new materials, intelligent equipment, new medicine, modern and efficient agriculture, and cultural tourism.
Gaoqing Branch is located at the construction site of the 200t/a hexafluorobutadiene project of Shandong Feiyuan Gas Co., Ltd. Qilu Yidian learned that the project is located in Gaoqing Chemical Industrial Park, with a new independent plant area with a total investment of 500 million yuan, an annual output of 200 tons of hexafluorobutadiene, and the first phase covers an area of 38 mu, with an annual output of 30 tons of hexafluorobutadiene. A set of production equipment, supporting raw materials and finished products warehouse, zinc powder warehouse, hazardous waste warehouse, power distribution room, anti-explosion control room and other facilities will be built.
"The hexafluorobutadiene we produce is mainly used in the advanced process technology of high-end chips (below 100nm) The processing and etching of 3D storage and logic chips is the only environmentally friendly etching gas that can meet the etching requirements among all etching gases at present. Compared with the traditional dry etching gas, it has significant competitive advantages in the production of electronic materials in terms of etching rate, etching uniformity, etching selection ratio, etc., and has a promising development prospect. " The project leader said.
About hexafluorobutadiene
Hexafluorobutadiene is a flammable, toxic, colorless and tasteless liquefied compressed gas in steel cylinders. When mixed with air and the concentration reaches 7%, there is an immediate danger of combustion and explosion.
Hexafluorobutadiene is a new fluorine-containing electronic gas, which can be used in industrial production as etching gas, polymerization monomer, synthesis intermediate, etc. In recent years, it has become one of the candidates most likely to replace the traditional fluorinated etching gas because of its excellent performance such as good etching selectivity, high accuracy and easy decomposition in the atmosphere.
Traditional fluorinated electronic gas is mainly used as etchant and cleaning agent, accounting for about 30% of the electronic gas market. In practical applications, hexafluorobutadiene can replace carbon tetrafluoride, and the market demand growth potential is huge in the future.
Hexafluorobutadiene is one of the new generation of fluorine-containing etching gases that can not only meet the development requirements of etching technology, but also minimize the impact on the environment. It has broad application prospects. However, the current market of electronic grade hexafluorobutadiene is still occupied by developed countries, and there are few enterprises in China that can produce high-purity hexafluorobutadiene, so high-purity products are still dependent on imports.
